Klostermann, UlrichUlrichKlostermannMülders, ThomasThomasMüldersPonomarenco, DenisDenisPonomarencoSchmoeller, ThomasThomasSchmoellerVan de Kerkhove, JeroenJeroenVan de KerkhoveDe Bisschop, PeterPeterDe Bisschop2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15609Calibration of physical resist models: methods, usability, and predictive powerProceedings paper