Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns

Soethoudt, JobJobSoethoudtHody, HubertHubertHodySpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetBriggs, BasoeneBasoeneBriggsChan, BTBTChanDelabie, AnneliesAnneliesDelabie2021-10-272021-10-2720192196-7350https://imec-publications.be/handle/20.500.12860/34042Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric NanopatternsJournal articlehttps://doi.org/10.1002/admi.201900896