A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology

Zhong, L.L.ZhongYang, JipingJipingYangHolland, K.K.HollandGrillaert, JoostJoostGrillaertDevriendt, KatiaKatiaDevriendtHeylen, NancyNancyHeylenMeuris, MarcMarcMeuris2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4054A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technologyJournal article