Optical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au, and ZrO2 in the extreme ultraviolet range

Saadeh, QaisQaisSaadehSokolov, AndreyAndreySokolovStormer, MichaelMichaelStormerKrishnamurthy, Gnanavel vaidhyanathanGnanavel vaidhyanathanKrishnamurthyvan de Kruijs, RobbertRobbertvan de KruijsGullikson, EricEricGulliksonQuintanilha, RichardRichardQuintanilhaPhilipsen, VickyVickyPhilipsenMeltchakov, EvgueniEvgueniMeltchakovDelmotte, FranckFranckDelmotteIeler, Oliver kOliver kIelerBieler, MarkMarkBielerSiewert, FrankFrankSiewertRudolph, IvoIvoRudolphOpsomer, KarlKarlOpsomerWu, MeiyiMeiyiWuSalami, ZanyarZanyarSalamiLaubis, ChristianChristianLaubisBabalik, AyhanAyhanBabalikGarcia, Danilo ocanaDanilo ocanaGarciaNaujok, PhilippPhilippNaujokBuchholz, ChristianChristianBuchholzSoltwisch, VictorVictorSoltwischScholze, FrankFrankScholze2026-10-282026-10-2820261094-4087https://imec-publications.be/handle/20.500.12860/60634engOptical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au, and ZrO2 in the extreme ultraviolet rangeJournal article10.1364/oe.595748WOS:001835095000006SOFT-X-RAYTI SEED LAYERVACUUM-ULTRAVIOLETTHIN-FILMSTRANSITION-METALSOXIDATION RESISTANCEMULTILAYER MIRRORSWAVELENGTH REGIONSCANDIUM FILMSCAPPING LAYER