Voltage contrast determination of design rules at the limits of EUV single patterning

Blanco, VictorVictorBlancoDe Poortere, Etienne P.Etienne P.De PoortereLeray, PhilippePhilippeLerayCerbu, DorinDorinCerbuvan de Kerkhove, JeroenJeroenvan de KerkhoveKissoon, Nicola N.Nicola N.Kissoon2024-03-252024-02-272024-03-2520231932-5150WOS:001134890300012https://imec-publications.be/handle/20.500.12860/43595Voltage contrast determination of design rules at the limits of EUV single patterningJournal article10.1117/1.JMM.22.4.041604WOS:001134890300012