Investigation of physical and electrical scaling limits of strontium titanate in metal-insulator-metal capacitors for DRAM technology

Popovici, Mihaela IoanaMihaela IoanaPopoviciRedolfi, AugustoAugustoRedolfiKaczer, BenBenKaczerHody, HubertHubertHodyJurczak, GosiaGosiaJurczakVan Elshocht, SvenSvenVan Elshocht2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27164Investigation of physical and electrical scaling limits of strontium titanate in metal-insulator-metal capacitors for DRAM technologyMeeting abstract