Le, Quoc ToanQuoc ToanLeSimms, IhsanIhsanSimmsYue, HenryHenryYueBrown, IanIanBrownKesters, ElsElsKestersStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe Gendt2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20992UV-induced modification of fluorocarbon polymer for improvement of wet removalMeeting abstract