Santaclara, Jara GJara GSantaclaraRispens, GijsbertGijsbertRispensBekaert, JoostJoostBekaertThiam, ArameArameThiamMaslow, MarkMarkMaslowHoefnagels, RikRikHoefnagelsZuurbier, NadiaNadiaZuurbiervan Lent, LidiaLidiavan LentFong Choi, YinYinFong Choi2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37147Today's scorecard for tomorrow's photoresist: progress and outlook towards High-NA EUV lithographyProceedings paperhttps://doi.org/10.1117/12.2586645