Probing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFM

Vandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21741Probing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFMOral presentation