Erdman, AndreasAndreasErdmanEvanschitzky, PeterPeterEvanschitzkyBret, TristanTristanBretJonckheere, RikRikJonckheere2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22316Modeling strategies for EUV mask multilayer defect dispositioningProceedings paper