Dixit, AbhisekAbhisekDixitKottantharayil, AnilAnilKottantharayilMercha, AbdelkarimAbdelkarimMerchaCollaert, NadineNadineCollaertBrus, StephanStephanBrusRichard, OlivierOlivierRichardRooyackers, RitaRitaRooyackersGoodwin, MichaelMichaelGoodwinJurczak, GosiaGosiaJurczakDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10396Towards optimally shaped fins in P-channel tri-gate FETs: Can fin height be reduced further?Proceedings paper