Kerfless layer-transfer of thin epitaxial silicon foils using novel multiple layer porous silicon stacks with near 100% detachment yield and large minority carrier diffusion lengths

Sivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanMartini, RobertoRobertoMartiniDepauw, ValerieValerieDepauwVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenBearda, TwanTwanBeardaGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-222021-10-2220150927-0248https://imec-publications.be/handle/20.500.12860/25921Kerfless layer-transfer of thin epitaxial silicon foils using novel multiple layer porous silicon stacks with near 100% detachment yield and large minority carrier diffusion lengthsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0927024814005807