A DLTS study on plasma-hydrogenated n-type high-resistivity MCz silicon

Huang, J.L.J.L.HuangSimoen, EddyEddySimoenClaeys, CorCorClaeysRafi, J.M.J.M.RafiClauws, P.P.Clauws2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12319A DLTS study on plasma-hydrogenated n-type high-resistivity MCz siliconJournal article