High Ge content SiGe thin films: growth, properties and integration

Hikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersMertens, HansHansMertensBender, HugoHugoBenderFavia, PaolaPaolaFaviaLoo, RogerRogerLoo2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23939High Ge content SiGe thin films: growth, properties and integrationMeeting abstracthttp://ma.ecsdl.org/content/MA2014-02/35/1847.abstract