Rare-earth aluminates as a charge trapping materials for NAND Flash memories: Integration and electrical evaluation

Suhane, AmitAmitSuhaneCacciato, AntonioAntonioCacciatoRichard, OlivierOlivierRichardArreghini, AntonioAntonioArreghiniAdelmann, ChristophChristophAdelmannSwerts, JohanJohanSwertsRothschild, AudeAudeRothschildVan den Bosch, GeertGeertVan den BoschBreuil, LaurentLaurentBreuilBender, HugoHugoBenderJurczak, GosiaGosiaJurczakDebusschere, IngridIngridDebusschereKittl, JorgeJorgeKittlDe Meyer, KristinKristinDe MeyerVan Houdt, JanJanVan Houdt2021-10-192021-10-1920110038-1101https://imec-publications.be/handle/20.500.12860/19848Rare-earth aluminates as a charge trapping materials for NAND Flash memories: Integration and electrical evaluationJournal article