Numerical analysis of airgap stability under process-induced thermo-mechanical loads

Zahedmanesh, HoumanHoumanZahedmaneshGonzalez, MarioMarioGonzalezCiofi, IvanIvanCiofiCroes, KristofKristofCroesBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26226Numerical analysis of airgap stability under process-induced thermo-mechanical loadsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325610