Yan, F.F.YanZhang, CanCanZhangCott, DaireDaireCottRobertson, JohnJohnRobertson2021-10-192021-10-1920100370-1972https://imec-publications.be/handle/20.500.12860/18379High-density growth of horizontally aligned carbon nanotubes for interconnectsJournal article