Reducing surface reflectivity below 10% by nano-features on random pyramid textured silicon wafers

Chan, BTBTChanGong, ChunChunGongJohn, JoachimJoachimJohnVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmans2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15077Reducing surface reflectivity below 10% by nano-features on random pyramid textured silicon wafersProceedings paper