Verlaan, VascoVascoVerlaanVerkerk, A.D.A.D.VerkerkArnoldbik, W.M.W.M.ArnoldbikVan der Werf, C.H.M.C.H.M.Van der WerfBakker, R.R.BakkerHouweling, Z.S.Z.S.HouwelingRomijn, I.G.I.G.RomijnBorsa, D.M.D.M.BorsaWeeber, A.W.A.W.WeeberLuxembourg, S.L.S.L.LuxembourgZeman, M.M.ZemanDekkers, HaroldHaroldDekkersSchropp, R.E.I.R.E.I.Schropp2021-10-182021-10-1820090040-6090https://imec-publications.be/handle/20.500.12860/16482The effect of composition on the bond structure and refractive index of silicon nitrideJournal article