Jourdan, NicolasNicolasJourdanvan der Veen, MarleenMarleenvan der VeenVega Gonzalez, VictorVictorVega GonzalezCroes, KristofKristofCroesLesniewska, AlicjaAlicjaLesniewskaVarela Pedreira, OlallaOlallaVarela PedreiraVan Elshocht, SvenSvenVan ElshochtBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26793CVD-Mn/CVD-Ru-based barrier/liner solution for advanced BEOL Cu/low-k interconnectsProceedings paperhttp://ieeexplore.ieee.org/document/7507652/