Determination of the film thickness of SIMOX substrates using simple calibration curves

Badenes, GonçalGonçalBadenesLosantos, P.P.LosantosCane, C.C.CaneLora-Tamayo, E.E.Lora-Tamayo2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1706Determination of the film thickness of SIMOX substrates using simple calibration curvesProceedings paper