Heterogeneous integration of a high-speed lithium niobate modulator on silicon nitride using micro-transfer printing

Vanackere, TomTomVanackereVandekerckhove, TomTomVandekerckhoveBogaert, LaurensLaurensBogaertBillet, MaximilienMaximilienBilletPoelman, StijnStijnPoelmanCuyvers, StijnStijnCuyversVan Kerrebrouck, J.J.Van KerrebrouckMoerman, A.A.MoermanCaytan, O.O.CaytanSingh, N.N.SinghLemey, S.S.LemeyTorfs, G.G.TorfsOssieur, P.P.OssieurRoelkens, GuntherGuntherRoelkensClemmen, StephaneStephaneClemmenKuyken, BartBartKuyken2023-12-182023-08-272023-12-1820232378-0967WOS:001048682100003https://imec-publications.be/handle/20.500.12860/42411Heterogeneous integration of a high-speed lithium niobate modulator on silicon nitride using micro-transfer printingJournal article10.1063/5.0150878WOS:001048682100003PHOTONICS