Study of the mechanical stress impact on silicide contact resistance by 4-point bending

Liu, YefanYefanLiuYu, HaoHaoYuHiblot, GaspardGaspardHiblotKruv, AnastasiiaAnastasiiaKruvSchaekers, MarcMarcSchaekersHoriguchi, NaotoNaotoHoriguchiVelenis, DimitriosDimitriosVelenisDe Wolf, IngridIngridDe Wolf2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33462Study of the mechanical stress impact on silicide contact resistance by 4-point bendingProceedings paperhttps://ieeexplore.ieee.org/document/8720416