Surface preparation and wet cleaning for germanium surface

Otsuji, MasayukiMasayukiOtsujiYoshida, YukifumiYukifumiYoshidaTakahashi, HiroakiHiroakiTakahashiSebaai, FaridFaridSebaaiWostyn, KurtKurtWostynHolsteyns, FrankFrankHolsteynsSato, MasanobuMasanobuSatoShirakawa, HajimeHajimeShirakawa2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29123Surface preparation and wet cleaning for germanium surfaceProceedings paperhttps://ieeexplore.ieee.org/document/7947551