Storm, WolfgangWolfgangStormVandervorst, WilfriedWilfriedVandervorstVanhaelemeersch, SergeSergeVanhaelemeerschBaklanov, MikhaïlMikhaïlBaklanovMaex, KarenKarenMaexPoleunis, C.C.PoleunisBertrand, P.P.Bertrand2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2159ToF-SIMS and XPS characterization of plasma etch residues on cobalt silicide surfacesProceedings paper