Tilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussanNolmans, PhilipPhilipNolmansEkkels, PhillipPhillipEkkelsCzarnecki, PiotrPiotrCzarneckiModlinski, RobertRobertModlinskiStoukatch, SergueiSergueiStoukatchJourdain, AnneAnneJourdainNauwelaers, BartBartNauwelaersVaesen, KristofKristofVaesenCarchon, GeertGeertCarchonDe Wolf, IngridIngridDe WolfDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11314Generic RF-MEMS technology platform for mobile and satellite communicationsProceedings paper