A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices

Moerman, IngridIngridMoermanVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2030A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devicesJournal article