SiO2/HfO2 MOSFETs after X-rays irradiation: impact on MOSFET performance and interface degradation

Cimino, SalvatoreSalvatoreCiminoPantisano, LuigiLuigiPantisanoPaccagnella, AlessandroAlessandroPaccagnellaGiubilato, PietroPietroGiubilatoGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8686SiO2/HfO2 MOSFETs after X-rays irradiation: impact on MOSFET performance and interface degradationOral presentation