Impact of the silicon substrate resistivity and growth condition on the deep levels in Ni-Au/AlN/Si MIS capacitors

Wang, ChongChongWangSimoen, EddyEddySimoenZhao, MingMingZhaoLi, WeiWeiLi2021-10-242021-10-2420170268-1242https://imec-publications.be/handle/20.500.12860/29895Impact of the silicon substrate resistivity and growth condition on the deep levels in Ni-Au/AlN/Si MIS capacitorsJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6641/aa7e20