Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Gronheid, RoelRoelGronheidRincon Delgadillo, PaulinaPaulinaRincon DelgadilloPathangi Sriraman, HariHariPathangi SriramanVan Den Heuvel, DieterDieterVan Den HeuvelParnell, DoniDoniParnellChan, BTBTChanLee, Yu-tsungYu-tsungLeeVan Look, LieveLieveVan LookCao, YiYiCaoHer, YoungJunYoungJunHerLin, GuanyangGuanyangLinHarukawa, RyotoRyotoHarukawaNagaswami, VenkatVenkatNagaswamiD'Urzo, LuciaLuciaD'UrzoSomervell, MarkMarkSomervellNealey, PaulPaulNealey2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23886Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flowProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1852186