Duerinckx, FilipFilipDuerinckxSzlufcik, JozefJozefSzlufcikDe Clercq, KoenKoenDe ClercqDe Schepper, P.P.De SchepperLaureys, WimWimLaureysNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/637PECVD silicon nitride passivation and ARC layers for srceenprinted multicrystalline silicon solar cellsProceedings paper