Fleischmann, ClaudiaClaudiaFleischmannMelkonyan, DavitDavitMelkonyanArnoldi, LaurentLaurentArnoldiBogdanowicz, JanuszJanuszBogdanowiczKumar, ArulArulKumarVeloso, AnabelaAnabelaVelosoVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/266253D dopant profiling in silicon nanowiresOral presentation