Hexagonal boron nitride nanowalls deposited by unbalanced magnetron RF sputtering

Hoang, DucDucHoangPobedinskas, MauliusMauliusPobedinskasJanssens, StoffelStoffelJanssensTurner, StuartStuartTurnerHardy, AnAnHardyVerbeeck, J.J.VerbeeckVan Bael, MarliesMarliesVan BaelD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25388Hexagonal boron nitride nanowalls deposited by unbalanced magnetron RF sputteringOral presentation