Impact of laser anneal thermal budget on the quality of thin SiGe channels with a high Ge content

Rosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyEveraert, Jean-LucJean-LucEveraertWitters, LiesbethLiesbethWittersMitard, JeromeJeromeMitardHoffmann, Thomas Y.Thomas Y.HoffmannVandervorst, WilfriedWilfriedVandervorstPap, A.A.PapPavelka,Pavelka2021-10-182021-10-182010-10https://imec-publications.be/handle/20.500.12860/17908Impact of laser anneal thermal budget on the quality of thin SiGe channels with a high Ge contentProceedings paper