Enhanced active P doping by using high order Ge precursors leading to intense photoluminescence

Shimura, YosukeYosukeShimuraSrinivasan, AshwynAshwynSrinivasanVan Thourhout, DriesDriesVan ThourhoutVan Deun, RikRikVan DeunPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutLoo, RogerRogerLoo2021-10-232021-10-2320160040-6090https://imec-publications.be/handle/20.500.12860/27304Enhanced active P doping by using high order Ge precursors leading to intense photoluminescenceJournal articlehttp://www.sciencedirect.com/science/article/pii/S0040609015007415