Direct measurement of semiconductors surface states parameters using Kelvin probe force microscopy

Rosenwaks, Y.Y.RosenwaksSaraf, S.S.SarafEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8086Direct measurement of semiconductors surface states parameters using Kelvin probe force microscopyProceedings paper