Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)

Fenger, GermainGermainFengerBekaert, JoostJoostBekaertTorres, AndresAndresTorresGranik, YuriYuriGranikKrasnova, PolinaPolinaKrasnovaDoise, JanJanDoiseBoeckx, CarolienCarolienBoeckxVandenberghe, GeertGeertVandenbergheGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25268Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)Proceedings paper