3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography

Qiu, YangYangQiuVan Marcke, PatriciaPatriciaVan MarckeRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/244053D imaging of Si FinFETs by combined HAADF-STEM and EDS tomographyOral presentation