Electrical properties along grain boundaries in multicrystalline silicon measured by capacitance technique

Chen, JimmyJimmyChenSimoen, EddyEddySimoenCornagliotti, EmanueleEmanueleCornagliottiHieckmann, E.E.HieckmannWeber, J.J.WeberPoortmans, JefJefPoortmans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18661Electrical properties along grain boundaries in multicrystalline silicon measured by capacitance techniqueOral presentation