Theory of photomodulated optical reflectance on active doping profiles in silicon

Bogdanowicz, JanuszJanuszBogdanowiczDortu, FabianFabianDortuClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstShaughnessy, DerrickDerrickShaughnessySalnick, AlexAlexSalnick2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15014Theory of photomodulated optical reflectance on active doping profiles in siliconMeeting abstract