Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)

Tung, C. MaryannC. MaryannTungDoise, JanJanDoiseKarageorgos, IoannisIoannisKarageorgosRyckaert, JulienJulienRyckaertWong, H.-S. PhilipH.-S. PhilipWong2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27409Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)Proceedings paperhttp://eipbn.omnibooksonline.com/data/papers/2016/5C4.pdf