Sioncke, SonjaSonjaSionckeLin, DennisDennisLinBrammertz, GuyGuyBrammertzDelabie, AnneliesAnneliesDelabieConard, ThierryThierryConardCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsFleischmann, ClaudiaClaudiaFleischmannTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantommeBeckhoff, BurkhardBurkhardBeckhoff2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17996ALD on high mobility channels: engineering the proper gate stack passivationMeeting abstract