Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS

Merckling, ClementClementMercklingChang, Yao-ChungYao-ChungChangPenaud, JulienJulienPenaudLu, Chung-YuChung-YuLuBrammertz, GuyGuyBrammertzMeuris, MarcMarcMeurisDekoster, JohanJohanDekosterHeyns, MarcMarcHeynsCaymax, MattyMattyCaymax2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17623Molecular beam passivation of Ge and III-V semiconductors for advanced CMOSMeeting abstract