Monolithic integration of microlenses on the backside of a silicon photonics chip for expanded beam coupling

Mangal, NiveshNiveshMangalSnyder, BradleyBradleySnyderVan Campenhout, JorisJorisVan CampenhoutVan Steenberge, GeertGeertVan SteenbergeMissinne, JeroenJeroenMissinne2022-09-212021-11-022022-09-2120211094-4087WOS:000624968100105https://imec-publications.be/handle/20.500.12860/38098Monolithic integration of microlenses on the backside of a silicon photonics chip for expanded beam couplingJournal article10.1364/OE.412353WOS:000624968100105ARRAYSMEDLINE:33726258