Evaluation of Nanosheet and Forksheet Width Modulation for Digital IC Design in the Sub-3 nm Era

Sisto, GiulianoGiulianoSistoZografos, OdysseasOdysseasZografosChehab, BilalBilalChehabKakarla, NaveenNaveenKakarlaXiang, YangYangXiangMilojevic, DragomirDragomirMilojevicWeckx, PieterPieterWeckxHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaert2023-03-172022-07-312023-03-1720221063-8210WOS:000829085500001https://imec-publications.be/handle/20.500.12860/40186Evaluation of Nanosheet and Forksheet Width Modulation for Digital IC Design in the Sub-3 nm EraJournal article10.1109/TVLSI.2022.3190080WOS:000829085500001