Nuytten, ThomasThomasNuyttenBogdanowicz, JanuszJanuszBogdanowiczAslam, ImranImranAslamWitters, LiesbethLiesbethWittersEneman, GeertGeertEnemanHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaBender, HugoHugoBenderDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31433Raman stress measurements at the nanoscaleProceedings paperhttp://ecst.ecsdl.org/content/86/7/311.abstract