Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses

Urbanowicz, AdamAdamUrbanowiczVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckVan Besien, ElsElsVan BesienTrompoukis, ChristosChristosTrompoukisShamiryan, DenisDenisShamiryanDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18119Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glassesMeeting abstract