De Bisschop, PeterPeterDe Bisschop2021-10-232021-10-2320160021-4922https://imec-publications.be/handle/20.500.12860/26490Optical proximity correction: a cross road of data flowsJournal articlehttp://iopscience.iop.org/article/10.7567/JJAP.55.06GA01/meta