Physical analysis of beakdown in High-k /metal gate stacks using TEM/EELS and STM for relibaility enhancement

Pey, Kin LeongKin LeongPeyRaghavan, NagarajanNagarajanRaghavanWu, XingXingWuLiu, WenhuWenhuLiuLi, XiangXiangLiBosman, MichelMichelBosmanShubhakar, KalyaKalyaShubhakarLwin, Zin ZarZin ZarLwinChen, YiningYiningChenQin, HailangHailangQinKauerauf, ThomasThomasKauerauf2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19567Physical analysis of beakdown in High-k /metal gate stacks using TEM/EELS and STM for relibaility enhancementJournal article