Modeling of bombardment induced oxidation of silicon with and without oxygen flooding

De Witte, HildeHildeDe WitteVandervorst, WilfriedWilfriedVandervorstGijbels, RenaatRenaatGijbels2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2511Modeling of bombardment induced oxidation of silicon with and without oxygen floodingProceedings paper